A novel thin film thickness measurement method is proposed.
2
基于X射线衍射与吸收理论，提出一种薄膜厚度测量方法即膜下基体衍射法。
Based on the theory of X-ray diffraction and absorption, a method for measuring the thickness of film material according to the diffraction intensity of the matrix below film was established.
3
指出了采用涡流测量薄膜厚度也是一种实用的测量方法。
It is indicated that the thin film thickness measurement by eddy is also a practical method.
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