采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
现代机构学具有广泛的应用前景，可以对可控机构、机器人、微机械、机械动力分析等的深入研究产生影响。
Modern mechanisms has a broad application prospect, it could make great effect on controllable mechanism, robot, micro mechanism, mechanical dynamical analysis, etc.
论文基于MEMS技术的微机械陀螺的研究，对于提高弹道修正的精度和效率具有重要的参考价值和应用前景。
The study of micromachined gyroscope based on MEMS in the paper have important reference value and application foreground in rising ballistic correction's accuracy and efficiency.
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