The characteristics of Auger depth profile as a method for superlattice structure analysis, as well as its limitations, are discussed.
讨论了用俄歇深度剖面分布作超晶格结构分析的特点及其局限性。
The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc.
俄歇电子发射，表面灵敏性，俄歇电子谱的测量，定性和定量分析，深度剖析等。
AES analyses of the oxide film and Auger chemical depth profile of the oxide film have been performed.
对氧化物进行了AES分析，得到了元素的深度分布。
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