最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。
The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.
在研究了等截面悬臂梁结构纳机电探针之后，本文还研究了在悬臂梁自由端集成了加热电阻的V型和U型悬臂梁维构纳机电探针。
Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.
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