Front-end process include: sacrificed oxide remove process; gate oxide grows process; source and drain implantation process; hydrogen anneal process.
其中前段工艺包括:牺牲氧化层去除工艺,栅极氧化层生长工艺,源漏离子注入工艺和氢气退火工艺。
参考来源 - 0.13微米逻辑电路负偏压温度不稳定性的改善·2,447,543篇论文数据，部分数据来源于NoteExpress
Finally, anneal process is used to resume etching damage to enhance the reliability of the element.
最后采用退火处理，进一步恢复刻蚀损伤，器件可靠性得到提高。
Long working life and small deforming can be realized by improving anneal process and quenching process.
通过改进退火工艺和淬火工艺，获得更高使用寿命和更小的变形。
The resistivity and flexivity of the resistance thermostat metal change while the anneal process change.
当退火工艺变化时，电阻系列热双金属的电阻率和温曲率等主要性能将产生变化。
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