The present invention relates to a kind of anode plate and its sputtering apparatus.
本发明涉及一种阳极板及一种包括所述阳极板的溅镀装置。
Positioning plate is usually used in fixing the place of anode plate and cathode plate in electrobath.
定位板主要是用来固定阳、阴极板在电解槽中的位置。
When the anode plate is used in sputtering DLC coating, no wrapping structures are formed in the edges of the substrate and the sputtered coating is firm with less falling off.
利用本发明的阳极板溅镀dlc膜层，在基材表面边缘处不产生包覆结构，膜层不易脱落。
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