A sliding mode synchronization controller of the reticle stage was added to the conventional PID control system.
在常规pid控制系统基础上增加了掩模台精动滑模同步控制器。
Results show that this method is feasible and control parameter in this system surpassed the conventional PID control system.
实验结果表明，在本系统中，模糊控制方法很好地实现了控制目的，控制品质明显好于常规pid控制方法。
The experiment results show that the fuzzy PID control system designed in this paper has better control performance than conventional PID control system.
实验结果表明，本文所设计的模糊pid控制系统比常规pid控制系统具有更优良的控制品质。
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