dc magnetron reactive sputtering technique
dc magnetron reactive sputtering technique
直流磁控反应溅射技术
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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The effect on the electrical and optical properties is studied as ITO transparent conductive thin films prepared by DC magnetron reactive sputtering technique with different deposition parameters.
论述了高温直流磁控反应溅射法制备ito透明导电薄膜时氧分压、溅射气压和溅射电流等参数对其光电特性的影响。
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