In this paper, the high frequency C-V, the annihilation of slow positron beam and the infrared reflectance techniques were used to study the property of interface in SiO2/SiC, the defects in SiO2 and their physical characteristics.
本文运用高频C-V、慢正电子淹没和红外反射谱的方法,分别研究SiO_2/SiC系统的界面特性、表面氧化层缺陷情况和氧化层物理特性。
参考来源 - SiO·2,447,543篇论文数据,部分数据来源于NoteExpress
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