It consists of cluster generating system, vacuum system, laser-cluster synchronization system, laser focusing system, and diagnosis facility for laser-cluster interaction.
该系统包括团簇产生系统、真空系统、激光与团簇同步系统、聚焦系统，以及激光与团簇相互作用诊断设备。
The characteristic of beam focusing is a very important issue of the ICF laser system.
光束聚焦特性是ICF激光系统中备受关注的问题之一。
To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.
为了提高在激光直写设备中光刻系统的写入精度，对光探头调焦系统进行了研究。
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