... mask alignment 掩模对准，掩模调整 mask artwork 掩模原图 mask comparator 掩模板比较仪 ...
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mask artwork verification 版图校验
·2,447,543篇论文数据，部分数据来源于NoteExpress
The operations for LSI mask artwork play an important role in the mask artwork analysis and verification software. The core in these operations is the boolean operation and topological analysis.
LSI掩模图形的运算在版图分析和校验软件中占有重要的地位，而其中最核心的图形运算是布尔运算和拓扑分析。
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