Micro-optical -electro-mechanical-system(MOEMS)have received a great of interest and attention from research labs and from the industry.
微光电子机械系统（MOEMS）已经在业界受到研究人员和相关人士的极大关注。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
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