The results indicated that the material conveying capacity and tank pressure increased, the material mass ratio of solid and gas in the outlet decreased with the raising of fluidized air quantity.

试验结果表明，物料输送量和流化罐压力随着流化空气量的增加而增加；流化罐出口物料固气质量比随着流化空气量的增加而减小。

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The results showed that the pressure increased with gas velocity and the amount of mist-hold of the outlet gas decreased slightly with gas velocity.

实验结果表明，压降随气速的增大而增大，出口气体含雾量随气速的增大仅略有下降。

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A new principle is adopted in designing low pressure MOCVD equipment. The principle is that the pressure is set and controlled separately in outlet and inlet of gas line of mass flow controller.

采用了一种新的设计原理，即以流量计为基准，将气体入口端和出口端压力双重分别统一控制，进行了低压MOCVD设计。

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