The proximity effect which consists in the lithography process of high energy electron beam to the resist film leads to a much larger area than the designed figures. The resolution of exposure system is reduced.
但是目前广泛使用的聚焦电子束由于加速电压高、电子散射距离长,光刻时高能电子束在对抗蚀剂的刻写过程中存在着邻近效应,使得实际曝光面积远大于设计图形尺寸,影响了曝光分辨率。
参考来源 - 纳米定位微位移工作台的控制技术研究As the density of VLSI circuit increases, the proximity effect has been one of the critical issues in optical lithography.
随着超大规模集成电路(VLSI)图形密度的增大,临近效应已成为光学光刻的关键问题之一。
参考来源 - 光学光刻工艺中邻近效应的定量分析 Quantitative Analysis of the Proximity Effect in Optical Lithographic ProcessThe proximity effect which consists in the lithography process of high energy electron beam to the resist film leads to a much larger area than the designed figures. The resolution of exposure system is reduced.
但是目前广泛使用的聚焦电子束由于加速电压高、电子散射距离长,光刻时高能电子束在对抗蚀剂的刻写过程中存在着邻近效应,使得实际曝光面积远大于设计图形尺寸,影响了曝光分辨率。
参考来源 - 纳米定位微位移工作台的控制技术研究·2,447,543篇论文数据,部分数据来源于NoteExpress
以上来源于: WordNet
The proximity effect in the E-beam lithography system was verified by experiments.
利用电子束曝光机完成有关邻近效应的实验。
The proximity effect in the SDS-3 E-beam lithography system is verified by experiments.
利用SDS - 3电子束曝光机完成有关邻近效应的试验。
The experiment results show that the method is effective to devise complex phase? Shifting masks and the proximity effect is decreased.
实验结果表明该方法对复杂相移掩模的设计有效,可以减小邻近效应。
But there's a lot of evidence that similarity, above and beyond proximity, has an effect on attractiveness and on liking.
但有很多证据表明,相似性,远不同于邻近性,前者会影响吸引和喜欢。
So, we quickly talked about certain aspects of why we like other people including proximity, similarity, and attractiveness, and where we left off was a discussion of the Matthew effect, which is basically that good things tend to compound.
我们昨天略为讲几个方面,解释我们为什么会喜欢他人,包括邻近性,相似性和吸引力,我们昨天最后讲的是马太效应,它是说,好事是会扎堆的。
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