... mid-frequency alternative reactive magnetron sputtering 中频交流反应磁控溅射 Reactive sputtering source 反应溅射源 reactive sputtering etching 反应性喷溅蚀刻 ...
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Reactive e sputtering source 反应溅射源
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ABSTRACT: in this paper a reactive ion plating method and system configuration of Gas ion source enhanced Magnetron Sputtering (GIMS) is presented in details.
摘要：本文详细介绍了气体离子源增强磁控溅射(气离溅射)反应离子镀膜技术和系统配置。
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