The main devices of the method include a grating interferometer, which controls the ruling engine motion, and a phase scanning mechanism.
该方法的主要装置包括一个用于控制刻划机运动的光栅干涉仪和一个相位扫描机构。
The control system of the VLS gratings ruling engine is given also and a ruling experiment of the VLS gratings is made to examine the novel method.
提出了采用相位扫描方法加工变栅距(VLS)光栅的基本原理,给出了VLS光栅刻划机的控制系统,并通过刻划实验对这一新方法进行了验证。
Ruling with grating ruling engine is still the most important means for the fabrication of master grating. Hence, it is valuable to track the state-of-the-art of the diffraction grating ruling engine.
采用高精度的衍射光栅刻划机刻划依然是制作高质量母光栅最重要的手段,因此,跟踪世界光栅刻划机的最新技术进展具有重要的现实意义。
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