Spatial Light Modulator-SLM 空间光调制器
An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.
通过双远心成像光路，激光直写（LDW）系统SVG-LDW 04把液晶空间光调制器（LCD-SLM）上的光斑直接成像在光刻胶板上，得到高质量的光斑图形。
The diffracted light intensity on axis of a Spatial light Modulator (SLM) with Multi-level Phase Fresnel Zone Plate (MPFZP) is studied by diffraction optical method.
用衍射光学方法研究了加有多级相位菲涅尔波带片(MPFZP)的空间光调制器(SLM)的轴上衍射光强。
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