The thermal isolation layer of thermal sensitivity systems must has high sensitivity of temperature change and low thermal wastage, PS with property of low thermal conductivity and large inner surface area can meet this requirements exactly.
多孔硅低热导率,大内表面积的性质正好符合热敏系统中对绝热层高温度变化敏感度和低热损耗的要求。
参考来源 - 微电子机械系统中重要材料—多孔硅的制备和应用的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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