Then, the films were characterized with X ray photoelectron spectroscopy(XPS), X ray diffraction(XRD), ultraviolet visible light absorption spectroscopy, and atomic force microscopy(AFM).

用X光电子能谱、X射线衍射、紫外可见吸收光谱、原子力显微镜等手段对制备的薄膜进行了表征。

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The x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS)and scanning electronic microscopy (SEM)were employed to analyze the structure, composition and surface morphology of the films .

用x射线衍射（XRD）、扫描电镜（SEM）和x光电子能谱（XPS）对样品进行了结构、形貌及组分分析。

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X-ray photoelectron spectroscopy and X-ray diffraction were used to analyze the chemical structure of the DLC films containing ti.

通过X射线光电子能谱及X射线衍射表征了薄膜的化学结构。

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