ion projection lithography machine 离子投影光刻机
cam lithography machine cam光刻机
beam lithography machine 电子束曝光机
E-beam lithography machine 电子束曝光机
e beam lithography machine 电子束曝光机
Lithography Machine Design Entry 光刻机设计入门
electron beam lithography machine 电子束曝光机
Stage system is a key subsystem for lithography, besides, it is the basic torealize function and precision of lithography machine.
工件台是光刻机最关键的子系统之一,也是实现光刻机功能和精度的基础。
参考来源 - 极紫外光刻机工件台精密机械及控制相关技术·2,447,543篇论文数据，部分数据来源于NoteExpress
Electron beam lithography machine is the key instrument for mask making and research of nanometer device.
电子束曝光技术是掩模版制作和纳米器件研究的主要手段。
In this paper, a unique hoisting structure of laser positioning stage system for electron-beam lithography machine is described.
本文介绍了电子束曝光机激光定位工作台的一种新型吊装结构。
The laser Positioning stage system with hoisting structure which is being developed is the main part of the Electron - beam Lithography Machine.
正在研制的激光定位吊装结构工作台系统是电子束曝光机的主要组成部分。
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