... 择优方法，最佳工艺：preferred process 择优定向;择优取向：preferential orientation 噪音容限：margin,noise ...
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关键词：热丝化学气相沉积；多晶硅薄膜 ；择优取向 ；晶化率 ；晶体形态 [gap=1148]Key words：HF CVD； PolySi thin film；preferential orientation；crystalline fraction；crystal morphology
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highly preferential orientation 高择优取向
preferential orientation correction 择优取向校正
control of preferential orientation 取向控制
preferential orientation of graphite 石墨择优取向
preferential orientation of martensite 马氏体择优取向
preferential growth orientation 择优取向
preferential crystal orientation 优势取向
All the ZnO:Ga films with the preferential orientation of（002）plane are polycrystalline and possess hexagonal wurtzite structure with their crystallographic c-axis perpendicular to the substrate. The grain size along the c-axis is found between 17 nm and 32 nm.2.
所制备的ZnO:Ga薄膜为具有(002)面单一择优取向的六角多晶纤锌矿结构且c轴垂直于衬底,薄膜沿c轴的晶粒尺寸在17-32nm之间。
参考来源 - 透明的高导电近红外反射ZnO：Ga薄膜的制备及特性研究·2,447,543篇论文数据，部分数据来源于NoteExpress
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