In comparison with the current discretization finite element method, the present method has the merits of easy data input, quick operation and storage saving in computer analysis.
本文方法与现有的离散化有限元法相比，具有输入数据简单，运算速度快，大量节省计算机内存的优点。
The invention provides a computer readable storage medium storing a program for performing an operation method of a substrate processing apparatus.
本发明提供一种存储有进行基板处理装置的运行方法的程序用的 计算机可读取的存储介质。
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