contact photolithography 接触光蚀刻
precision photolithography 精密光刻
relaxed registration photolithography 不严格对准光刻
projection photolithography 投影光刻法
photolithography mask layers 光石版照相罩幕层
e-beam photolithography 电子束显影法 ; 电子束微影术
photolithography limitation [电子] 光刻极限
photolithography technique [电子] 光刻工艺
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以上来源于: WordNet
N a lithographic printing process using photographically made plates 照相平版 (Often shortened to photolitho)
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