关键词 磁控管 溅射率 非平衡磁控溅射 闭合场非平衡磁控溅射 自溅射 213 直流溅射 ( DC Magnetron Sputtering ) 、射频溅 射( RF Magnetron Sputtering) 、脉冲溅射 ( Pulsed Magnetron Sputtering) 和中频溅射 ( Medium Fre2 quency Magnet...
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dc magnetron sputtering system 直流磁控溅镀系统
dc magnetron sputtering method 直流磁控溅射法
dc magnetron sputtering technique 直流磁控溅射法
mw-ecr dc magnetron sputtering 微波电子回旋共振直流磁控溅射
multi-arc DC magnetron sputtering 多弧直流磁控溅射
room temperature dc magnetron sputtering 室温直流磁控溅射
DC reactive magnetron sputtering 直流反应磁控溅射 ; 直流磁控溅射
DC magnetron reactive sputtering 直流磁控反应溅射
DC magnetron co-sputtering 直流磁控共溅射
ZnO: Al thin films were prepared on slide glass substrates by non-reactive DC magnetron sputtering at room temperature.
采用直流磁控溅射工艺，室温下在载玻片上制备了氧化锌铝透明导电薄膜。
High quality nickel films have been successfully plated on cenosphere particles by dc magnetron sputtering at mom temperature.
本文论述了在空心微珠表面磁控溅射镀金属薄膜的方法。
The experimental condition of DC magnetron sputtering for ZMO films with good optical and electric properties has been established.
获得了直流磁控溅射法制备具有良好光电特性的ZMO薄膜的最佳工艺条件；
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