ion beam etching 离子束腐蚀 ; 离子束刻蚀
ion beam etching system 离子束蚀刻系统 ; 离子束刻蚀系统
ar ion beam etching 氩离子束刻蚀
ion beam etching rate 离子束刻蚀速率
argon ion beam etching 氩离子束刻蚀
Ion Beam Etching system- 离子束刻蚀系统
reactive ion-beam etching 反应离子束刻蚀
Ion Beam Etching Cleaning 离子束刻蚀清洗
The influence of quadratic effect of ion-beam etching on pattern profile and the influence of ion-beam etching incidence Angle on slope of pattern sidewall are studied.
介绍了离子束刻蚀的二次效应对图形轮廓以及离子束刻蚀入射角对图形侧壁陡度的影响。
Abstract : Ion beam etching technologies for developing large aperture Diffractive Optical Elements (DOEs) were reviewed.
摘要 ： 总结了大尺寸衍射光学元件离子束刻蚀技术的研究进展。
The gated silicon field emitter arrays (FEA) with small gate aperture have been successfully fabricated by dry etching, including ion beam etching (IBE) and reactive ion etching (RIE).
利用离子束刻蚀(IBE)和反应离子刻蚀(RIE)等干法刻蚀方法来制造带栅极的场发射阴极阵列。
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