It is concluded that high-groove-efficiency blazed gratings used in the vacuum ultraviolet and soft X-ray wavelengths can be easily fabricated by this method at normal or near-normal incidences.
此方法可以应用于真空紫外和软x射线波段的光栅制作，在获得较高的槽形效率的同时，可以大大减少其制作难度及成本。
It is concluded that high-groove-efficiency blazed gratings used in the vacuum ultraviolet and soft X-ray wavelengths can be easily fabricated by this method at normal or near-normal incidences.
此方法可以应用于真空紫外和软x射线波段的光栅制作，在获得较高的槽形效率的同时，可以大大减少其制作难度及成本。
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